[18p-A36-1~11] 先端イオン/電子顕微鏡技術のナノスケール材料・デバイスへの応用展開

13:30 〜 13:45英語発表

[18p-A36-1] Application of Advanced ion / electron microscopy for future nano scale materials and devices -Introduction to the Symposium-

〇Shinichi Ogawa¹, Jun Taniguchi² (1.AIST, 2.TUS)

キーワード：

ion microscopy、electron minroscopy、semiconductor

This symposium aims to broadly discuss research outcomes and technologies related to the control of nanoscale material properties, the creation and evaluation of devices using advanced gas (helium) ion/electron microscopy techniques. The goal is to deepen understanding of these cutting-edge ion/electron microscopy technologies and to promote their further effective utilization in the research and development of materials and devices.