講演情報
[11a-A31-4]Electrical Readout of Single-Crystal Diamond MEMS Resonators for Infrared Sensing
〇(P)Guo Chen1, Zhaozong Zhang1, Satoshi Koizumi1, Meiyong Liao1 (1.NIMS)
キーワード：
Diamond、MEMS、IR
Microelectromechanical systems (MEMS) based on single-crystal diamond (SCD) have attracted considerable attention owing to diamond’s exceptional mechanical stiffness, high thermal conductivity, chemical stability, and wide bandgap. These properties make SCD a promising platform for resonant sensors operating in harsh environments and for applications requiring high stability and high sensitivity. MEMS resonators are particularly attractive for IR sensing because they offer high sensitivity, fast response, strong reliability, and low power consumption, enabling efficient detection of IR-induced thermal effects. However, the practical integration of diamond MEMS resonators with electronic circuits requires reliable electrical readout.
In this work, we demonstrate the electrical readout of SCD cantilever resonators for IR sensing. Metal electrodes were deposited on the surface of the diamond cantilevers, consisting of Ti/Au layers with thicknesses of 50 nm and 10 nm, respectively. The electrical readout is based on the piezoresistive effect of the metal electrodes. When the cantilever resonator vibrates at resonance, bending-induced strain changes the resistance of the metal electrode, enabling electrical detection of the mechanical resonance.
This approach provides a simple and effective route toward circuit-compatible diamond MEMS sensors. The electrical readout scheme based on metal piezoresistance is attractive for integrating SCD resonators with on-chip or external electronic circuits and may be extended to other resonant sensing applications, such as magnetic, thermal, and force sensing.
In this work, we demonstrate the electrical readout of SCD cantilever resonators for IR sensing. Metal electrodes were deposited on the surface of the diamond cantilevers, consisting of Ti/Au layers with thicknesses of 50 nm and 10 nm, respectively. The electrical readout is based on the piezoresistive effect of the metal electrodes. When the cantilever resonator vibrates at resonance, bending-induced strain changes the resistance of the metal electrode, enabling electrical detection of the mechanical resonance.
This approach provides a simple and effective route toward circuit-compatible diamond MEMS sensors. The electrical readout scheme based on metal piezoresistance is attractive for integrating SCD resonators with on-chip or external electronic circuits and may be extended to other resonant sensing applications, such as magnetic, thermal, and force sensing.