講演情報
[11p-E208-3]Tunnel-magnetoresistance sensor using nanocrystalline Fe-B-Cu alloy thin films as flux concentrators
〇Yichen Wang1, Miyaura Tomoko1, Oogane Mikihiko1,2, Nakano Takafumi1,3 (1.Tohoku Univ, 2.Tohoku Univ CSIS, 3.Tohoku Univ. Green X-Tech)
キーワード：
TMR sensor、soft magnetic materials、flux concentrator
This study developed TMR sensors using nanocrystalline Fe–B–Cu alloy thin-film flux concentrators to enhance magnetic-field sensitivity. The Fe–B–Cu films were prepared by RF sputtering and optimized through magnetic-field annealing. The films exhibited excellent soft magnetic properties, including a low coercivity of approximately 0.3 Oe and a high saturation magnetization of about 1250 emu/cm³. By integrating these films as flux concentrators, the sensitivity of the TMR sensors improved from 7 %/Oe to 104 %/Oe, achieving an enhancement factor of approximately 15. In the presentation, we will discuss the Cu-content dependence of the magnetic properties and the effects of different annealing processes.