[1J09-13] Beam Application 1

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[1J12] Radiation chemistry of organotin

*Shotaro Fuku¹, Kohei Hashimoto¹, Yusa Muroya¹, Takahiro Kozawa¹, Kohei Machida², Satoshi Enomoto² (1. SANKEN. U.Osaka, 2. Toyo Gosei Co.)

Keywords:

radiation chemistry,organic tin,gamma radiolysis,EUV resist

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