Presentation Information

[1J12]Radiation chemistry of organotin

*Shotaro Fuku1, Kohei Hashimoto1, Yusa Muroya1, Takahiro Kozawa1, Kohei Machida2, Satoshi Enomoto2 (1. SANKEN. U.Osaka, 2. Toyo Gosei Co.)

Keywords:

radiation chemistry,organic tin,gamma radiolysis,EUV resist

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