2026 Annual Meeting
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Session Details

Planning LectureTechnical division and Network : Subcommittee on Particle Accelerator and Beam Science

[3G_PL]The Cutting Edge of Accelerator EUV Light Sources and Resist Materials for Advanced Semiconductor Manufacturing

Fri. Mar 13, 2026 1:00 PM - 2:30 PM JST
Fri. Mar 13, 2026 4:00 AM - 5:30 AM UTC
Room G(Kumamoto-jo Hall 4F Conference RoomC)
Chair:Hiroyuki Toyokawa(AIST)

[3G_PL01]Free-Electron Laser EUV light Source

*Yosuke Honda1 (1. KEK)

[3G_PL02]Current Status and Future Prospect of Resist Materials for EUV Radiations

*Takahiro Kozawa1 (1. UOsaka)
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