[3G07-08] 6. Solid Surfaces, Wetting, Adsorption and Adhesion | The 76th Divisional Meeting of DCSC

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Regular Session (Oral)6. Solid Surfaces, Wetting, Adsorption and Adhesion

[3G07-08]6. Solid Surfaces, Wetting, Adsorption and Adhesion

Wed. Sep 24, 2025 11:00 AM - 11:40 AM JST
Wed. Sep 24, 2025 2:00 AM - 2:40 AM UTC

Room G(17-212)

11:00 AM - 11:20 AM JST(2:00 AM - 2:20 AM UTC)

[3G07]Permeability of Developer Solution in Photoresist for EUV Applications

*Naoto Yanase¹, Eri Hattori¹, Tadashi Kajiya¹, Yasuhiro Kawatani¹, Mitsuhiro Fujita¹, Kazuhiro Marumo², Hokuto Yamazaki² (1. Analysis Technology Center, FUJIFILM Corporation (Japan), 2. Electronic Materials Research & Development Center, FUJIFILM Corporation (Japan))

11:20 AM - 11:40 AM JST(2:20 AM - 2:40 AM UTC)

[3G08]Rotational degrees of freedom of ions at the interface of ionic plastic crystals

*Iori Tabata¹, Ryugo Yashiki², Yuko Yokoyama¹, TeTsuo Sakka¹, Naoya Nishi¹ (1. Graduate School of Engineering, Kyoto University (Japan), 2. Faculty of Engineering, Kyoto University (Japan))

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