Presentation Information
[[C]C302-4am1-05]Theoretical Study of NH3 Decomposition Process on GaN Surface.
○Kazuki Tsunoda1, Kanami Sugiyama2, Hirofumi Sato2,3 (1. Faculty of Engineering, Kyoto Univ., 2. Graduate School of Engineering, Kyoto Univ., 3. Fukui Institute for Fundamental Chemistry, Kyoto Univ.)
Keywords:
Gallium nitride,Surface reaction,Crystal growth,MOVPE,reaction path search