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[[C]C302-4am1-05]Theoretical Study of NH3 Decomposition Process on GaN Surface.

○Kazuki Tsunoda1, Kanami Sugiyama2, Hirofumi Sato2,3 (1. Faculty of Engineering, Kyoto Univ., 2. Graduate School of Engineering, Kyoto Univ., 3. Fukui Institute for Fundamental Chemistry, Kyoto Univ.)
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Keywords:

Gallium nitride,Surface reaction,Crystal growth,MOVPE,reaction path search