Presentation Information
[P3-43]Observation of dislocations generated at the seeding interface in Czochralski (CZ) Si single crystal growth
*Shoma Tsukada1, Hiroki Tsukada1, Rintaro To1, Takeshi Hoshikawa1, Hiroyuki Saito2, Hisashi Matsumura1,2, Toshinori Taishi1 (1. Shinshu Univ. (Japan), 2. GlobalWafers Japan Co., Ltd. (Japan))