The Institute of Electronics, Information and Communication Engineers General Conference
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Presentation Information

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[C-6-01]Characterization of ZrO2 film sputter-deposited at room temperature

○Mayumi B. Takeyama1,2 (1. Kitami Institute of Technology, 2. WOW Alliance Tokyo Institute of Technology)

Keywords:

LSI,ReRAM,ZrO2 film,low temperature deposition,insulating film

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