The Institute of Electronics, Information and Communication Engineers General Conference
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Presentation Information

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[C-6-02]Orientation analysis of Cu film deposited on (111) oriented TaN film

○Masaru Sato1, Mayumi B.Takeyama1 (1. Kitami Inst. of Tech.)

Keywords:

interconeect

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