The Institute of Electronics, Information and Communication Engineers General Conference
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Presentation Information

2:50 PM - 3:20 PM JST(5:50 AM - 6:20 AM UTC)

[CI-2-03]Process informatics techniques for innovation of SiC bulk growth technology

○Hidekazu Tsuchida1, Toru Ujihara2, Shunta Harada2, Kentaro Kutsukake3, Kenta Murayama4, Masaki Takaishi5 (1. CRIEPI, 2. Nagoya Univ., 3. RIKEN, 4. Mipox, 5. AIxtal)
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Keywords:

SiC,crystal growth,process informatics,AI,data assimilation

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