[C-12] Integrated Circuit and Devices

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)Candidate for Academic Incentive AwardCareer Explorer

[C-12-57] フリップチップ裏面電圧印加による集積回路特性変動の評価

◎△Shuhei Yokota¹, Rikuu Hasegawa¹, Takuya Wadatsumi¹, Kazuki Monta¹, Junichi Sakamoto², Shinichi Kawamura², Makoto Nagata^1,2 (1. Kobe University, 2. Inst. of Advanced Industrial Science and Technology)

Keywords:

Flip Chip,Backside biasing,Emission Microscope