[FMCp2] Manufacturing and Process

[FMCp2-9] Study on the Exposure Principles and Design Rules of Nikon Exposure Machine With ITO2 PSM Mask in LTPS LCD

*Wu Jing¹, Xuexin Lan¹, Chunrong Lin¹, Yanmei Li¹, Xianyan Yang¹ (1. XiaMen Tianma Microelectronics Co., Ltd., (China))

Keywords:

Nikon 67S,PSM mask,3slits,Exposure analysis