Presentation Information

[FMC9/VHF6-3]Design of a 4-Channel Scanning Acoustic Microscopy System with Synthetic Aperture Focusing for High-Resolution Defect Detection in OLED Displays

*Hwijin Kim1, Sohyun Won1, Seoyoung Jang1, Heechul Yoon1 (1. Dankook University (Korea))

Keywords:

Wafer,Non-destructive testing,Scanning acoustic microscopy,Synthetic aperture focusing

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