[O2-9] Ultra-high-speed Control System Based on USPM Controller

3:30 PM - 3:50 PM JST(6:30 AM - 6:50 AM UTC)

[O2-9-04] 10MHz Multisampling Deadbeat Position Control of Piezoelectric Actuator

*Shohei Arikawa¹, Tomoki Yokoyama², Naoki Motoi¹ (1. Kobe University (Japan), 2. Tokyo Denki University (Japan))

Keywords:

Deadbeat control,Motion control,Micromanipulation,Piezoelectric actuator