[O] Complex Gas Atmospheres

3:05 PM - 3:30 PM JST(6:05 AM - 6:30 AM UTC)

[O-34] Corrosion behavior of 316L stainless steel in hydrogen fluoride gas at 400 degree celsius

*Naoki Sei¹, Yoshiyuki Otake¹, Yoshihiko Koyanagi¹, Brian Gleeson² (1. Daido Steel (Japan), 2. University of Pittsburgh (USA))

Keywords:

halogen gas,Stainless steel,hydrogen fluoride,semiconductor