[IS] IS2 Recent Trends and Future Perspectives of Semiconductor Materials

1:30 PM - 2:00 PM JST(4:30 AM - 5:00 AM UTC)

[IS2.6] Research on new transistor structures and materials in AIST toward 2 nm technology node and beyond

*Toshifumi Irisawa¹ (1. National Institute of Advanced Science and Technology)

Keywords:

Advanced Semicondctor Technology,GAAFET,2D material,300 mm pilot line

New transistor structures and materials reserch performed in AIST toward 2 nm technology node and beyond are presented.