[IS] IS2 Recent Trends and Future Perspectives of Semiconductor Materials

13:30 〜 14:00

[IS2.6] Research on new transistor structures and materials in AIST toward 2 nm technology node and beyond

*Toshifumi Irisawa¹ (1. National Institute of Advanced Science and Technology)

キーワード：

Advanced Semicondctor Technology、GAAFET、2D material、300 mm pilot line

New transistor structures and materials reserch performed in AIST toward 2 nm technology node and beyond are presented.