[IS] IS2 Recent Trends and Future Perspectives of Semiconductor Materials

2:45 PM - 3:15 PM JST(5:45 AM - 6:15 AM UTC)

[IS2.8] Machine Learning Technology in SiC Solution Growth Method

*Toru UJIHARA¹ (1. Nagoya Univ.)

Keywords:

Machine learning,SiC,Crystal growth

Materials development requires both discovery and process optimization. We applied process informatics with digital twins to SiC crystal growth, achieving 8-inch crystals with low defect density.