[IS] IS2 Recent Trends and Future Perspectives of Semiconductor Materials

14:45 〜 15:15

[IS2.8] Machine Learning Technology in SiC Solution Growth Method

*Toru UJIHARA¹ (1. Nagoya Univ.)

キーワード：

Machine learning、SiC、Crystal growth

Materials development requires both discovery and process optimization. We applied process informatics with digital twins to SiC crystal growth, achieving 8-inch crystals with low defect density.