[19a-A301-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[19a-A301-9] Crystallization of a-Si Films Deposited by RF Sputtering using Blue Direct Diode Laser (Part 4)

〇Tatsuya Okada¹, Takashi Noguchi¹, Mitsuoki Hishida², Kentaro Miyano², Naohiko Kobata², Masaki Nobuoka² (1.Univ. Ryukyus, 2.Panasonic Connect)

Keywords:

Blue Direct Diode Laser