Presentation Information
[19a-A601-6]Beyond-EUV source emission from solid state laser-produced Gd plasma
〇Masaki Kume1, Takeru Niinuma1, Tsukasa Sugiura1, Nozomi Tohara1, Hayato Yazawa1, Hiroki Morita1, Takeshi Higashiguchi1 (1.Utsunomiya Univ.)
Keywords:
Laser-produced plasma,Soft X-ray,Beyond-EUV light source