Presentation Information

[19a-A601-6]Beyond-EUV source emission from solid state laser-produced Gd plasma

〇Masaki Kume1, Takeru Niinuma1, Tsukasa Sugiura1, Nozomi Tohara1, Hayato Yazawa1, Hiroki Morita1, Takeshi Higashiguchi1 (1.Utsunomiya Univ.)

Keywords:

Laser-produced plasma,Soft X-ray,Beyond-EUV light source