The 84th JSAP Autumn Meeting 2023
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Session Details

Oral presentation7 Beam Technology and Nanofabrication : 7.1 X-ray technologies

[19a-A601-1~9]7.1 X-ray technologies

Tue. Sep 19, 2023 9:00 AM - 11:30 AM JST
Tue. Sep 19, 2023 12:00 AM - 2:30 AM UTC
A601 (KJ Hall)
Masahiko Ishino(QST)
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9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[19a-A601-1]Design of high diffraction efficiency and high resolutionsoft X-ray laminar-type multilayer gratings for 2-4 keV region (III)

〇Masato Koike1,2,3, Tadashi Hatano2, Pirozhkov Alexander1, Yoshihiro Ueno4, Masami Terauchi2 (1.QST, 2.Tohoku Univ., 3.Osaka Metro. Univ., 4.Shimadzu Corp.)
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9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[19a-A601-2]Development of Narrowband Multilayer Mirrors for Extracting a Single Harmonic from an EUV HHG Source

〇Yuya Iwamoto1, Suet Yi Liu1, Hiroki Mashiko2, Satoshi Ichimaru2, Masatoshi Hatayama2, Eric Gullikson4, Tomoya Mizuno3, Takayuki Kurihara3, Jiro Itatani3, Hisataka Takenaka1 (1.TOYAMA Co. Ltd., 2.NTT Advanced Technology Co., 3.Univ. of Tokyo, 4.LBNL)
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9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[19a-A601-3]Global Optimization of Four-Multilayer-Mirror Objective for Soft-X-Ray Imaging Applications

〇Mitsunori Toyoda1, Jun Chen1 (1.Tokyo Polytechnic Univ.)
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9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation AwardEnglish Presentation

[19a-A601-4]Emission spectroscopy of hydrogen plasma produced by extreme ultraviolet light for nanolithography applications

〇(P)James Edward Hernandez1, Nozomi Tanaka1, (M1)Ryuya Yamada1, (D)Yubo Wang1, Katsunobu Nishihara1, Shinsuke Fujioka1, Atsushi Sunahara1,2, Tomoyuki Johzaki1,3, Kyung Sik Kang4, Youngduk Suh4, Jeong-Gil Kim4, Shinji Ueyama5, Ken Ozawa5 (1.ILE Osaka Univ., 2.Purdue Univ., 3.Hiroshima Univ., 4.MRSamsung El.Co.Ltd., 5.Samsung Japan Corp.)
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10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[19a-A601-5]Measurement of Sn ion energy and estimation of target density distribution to extend lifetime of the collector mirror for EUV light source

〇Yoshiyuki Honda1, Shinji Nagai1, Tomoyoshi Toida1, Hirokazu Hosoda1, Takeru Niinuma2, Masaki Kume2, Hiroki Morita2, Takeshi Higashiguchi2 (1.Gigaphoton Inc., 2.Utsunomiya Univ.)
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10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[19a-A601-6]Beyond-EUV source emission from solid state laser-produced Gd plasma

〇Masaki Kume1, Takeru Niinuma1, Tsukasa Sugiura1, Nozomi Tohara1, Hayato Yazawa1, Hiroki Morita1, Takeshi Higashiguchi1 (1.Utsunomiya Univ.)
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10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[19a-A601-7]Angular dependence of sprathermal ions emitted from a laser-produced Gd plasma

〇Takeru Niinuma1, Masaki Kume1, Tsukasa Sugiura1, Hayato Yazawa1, Hiroki Morita1, Takeshi Higashiguchi1 (1.Utsunomiya Univ.)
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11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[19a-A601-8]Charge-separated Gd ion energy spectra for sub-nanosecond laser irradiation

〇Hiroki Morita1, Takeru Niinuma1, Masaki Kume1, Tsukasa Sugiura1, Takeshi Higashiguchi1 (1.Utsunomiya Univ.)
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11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[19a-A601-9]Efficient extreme ultraviolet (EUV) source

〇Takeshi Higashiguchi1, Hiroki Morita1, Shinichi Namba2, Kentato Tomita3, Atsushi Sunahara4 (1.Utsunomiya Univ., 2.Hiroshima Univ., 3.Hokkaido Univ., 4.Purdue Univ.)
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