Presentation Information

[19p-A302-16]Effect of Zn Concentration in InZnO TFTs on CO2 Gas Sensing Characteristics

〇(M2)Ayumu Nodera1, Ryota Kobayashi1, Shinri Yamadera1, Kanta Kibishi1, Kobayashi Tsubasa1, Shinya Aikawa1 (1.Kogakuin Univ.)

Keywords:

TFT,CO2,sensor