Presentation Information
[19p-A302-16]Effect of Zn Concentration in InZnO TFTs on CO2 Gas Sensing Characteristics
〇(M2)Ayumu Nodera1, Ryota Kobayashi1, Shinri Yamadera1, Kanta Kibishi1, Kobayashi Tsubasa1, Shinya Aikawa1 (1.Kogakuin Univ.)
Keywords:
TFT,CO2,sensor