Presentation Information

[19p-B101-14]Electrical properties of V-based Ohmic contacts on n-type AlGaN with high Al content

〇Kazuaki Ebata1, Masanobu Hiroki1, Kouta Tateno1, Kazuhide Kumakura1, Yoshitaka Taniyasu1 (1.NTT BRL)

Keywords:

AlGaN,n-type,Ohmic contact