[20a-A401-1~2] 8.8 Plasma Electronics Division Award Speech

9:45 AM - 10:15 AM JST(12:45 AM - 1:15 AM UTC)

[20a-A401-1] [The 21st Plasama Electronics Award Speech] Imaging angular distribution measurement of high-energy particles impinging on RF electrode

〇Hirotaka Toyoda¹, Keita Ichikawa¹, Manh Hung Chu¹, Makoto Moriyama¹, Haruka Suzuki¹, Daiki Iino², Hiroyuki Fukumizu², Kazuaki Kurihara² (1.Nagoya Univ., 2.KIOXIA)

Keywords:

Angular Distribution,Etching,High energy particle

Angular distribution of high energy particles impinging on substrate is one of important parameters to determine etching accuracy. We have developed an apparatus to measure angular distributions of high-energy ions and neutrals by detecting high energy species passing through an orifice on RF electrode and a drift tube using a micro-channel-plate and imaging technique. Angular distributions of high-energy ions and neutrals were successfully measured in single- and dual-frequency capacitively coupled plasmas.