Presentation Information

[20a-B202-3]Deposition of Si nanowires by RF magnetron sputtering and the effect of oxide film on Li ion battery performance.

〇Koudai Masumoto1, Ryo Hanai1, Masayuki Ishihara1, Tomoki Omae1, Tomohisa Nakada1, Ryoto Niwa1, Reon Yokoi1, Giichiro Uchida1 (1.Meijo Univ.)

Keywords:

sputtering,Li ion battery