[20a-B202-1~10] CS.11 Code-sharing Session of 8.3 & 9.2

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[20a-B202-5] Formation of HfN nanoparticles on Si by remote plasma and plasmonic properties

〇Takeshi Kitajima¹, Toshiki Nakano¹ (1.Nat. Def. Acad.)

Keywords:

plasma,plasmon,HfN

HfN nanoparticles are attracting attention as materials for local heat generation and photochemical applications because they are non-noble metals that have plasmon resonance in the visible region. Hf nanoparticles were formed on SiO2/Si(100) samples by electron beam evaporation, and HfN nanoparticles with a diameter of 20-50 nm were formed by nitrogen radical irradiation from N₂ inductively coupled remote plasma. In the UV-visible light absorption spectrum, the peak at 550 nm corresponding to the plasmon resonance was not clear, but the absorption peak of the interband transition near 280 nm was confirmed.