Presentation Information
[20a-B205-8]P+ and N+ ion implantation on femtosecond-laser-irradiated diamond surface
〇(M2)Fumiya Iwaasa1, Tomoyuki Ueki1, Takuro Tomita1, Tatsuya Okada1 (1.Tokushima Univ.)
Keywords:
femtosecond laser,diamond,ion implantation
We investigated the effect of femtosecond-laser-induced surface modifications on ion incorporation into diamond crystal. The (001) surface of a diamond crystal was irradiated with femtosecond laser pulses. Phosphorus (P+) and nitrogen (N+) ions were separately implanted on the laser-irradiated surface at 600 °C. The ion concentration along the depth of the crystal was measured with secondary ion mass spectroscopy. For both ions, i.e., P+ and N+, the ion concentration was higher in the laser-irradiated area than in the non-irradiated area after the concentration peak. That is, the introduction of laser-induced surface modifications enhanced the ion migration along the depth direction. Transmission electron microscopy showed that the crystallinity of diamond was maintained. These results support the idea that femtosecond-laser-induced surface modifications can enhance dopant incorporation into diamond while preserving the diamond's crystallinity.