[20a-P01-1~14] 6.2 Carbon-based thin films

[20a-P01-12] Changes in physical properties of amorphous carbon thin films under continuous

〇(M1)Sota Nakagawa¹, Fumi Sugihara¹, Hirofumi Onozawa¹, Yuito Igarashi¹, Syuji Obata¹, Kenji Hirakuri¹, Yasuharu Ohogoe¹ (1.Tokyo Denki Univ)

Keywords:

diamond like carbon