[20a-P01-1~14] 6.2 Carbon-based thin films

[20a-P01-6] Raman mapping investigation of a-C:H films coated on SKD substrates with different surface roughness

〇Noriyuki Hasuike¹, Ryosuke Abe², Tsukuru Kinoshita², Hideo Fukumura², Kenji Kisoda³ (1.Kyoto Inst. of Tech., 2.Sumitomo Heavy Industries, Ltd., 3.Wakayama Univ.)

Keywords:

a-C:H,Raman mapping