The 84th JSAP Autumn Meeting 2023
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Tue. Sep 19, 2023
Wed. Sep 20, 2023
Thu. Sep 21, 2023
Fri. Sep 22, 2023
Sat. Sep 23, 2023
JSAP EXPO (Exhibition) 1
Vacuum
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[20a-P02-10]
Chemical lift-off of Ga2O3 films by using epitaxial sacrificial layer
〇Kazuaki Akaiwa
1
, Kunio Ichino
1
(1.Tottori univ.)
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Keywords:
gallium oxides,chemical lift off
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