Presentation Information
[20a-P02-21]Study on crystallization of amorphous WO3 films using in-situ X-ray diffraction
〇(M2)Ayaka Fukuchi1, Jia Junjun2, Risa Nakamura1, Eisuke Magome3, Tetsuaki Nishida4, Nobuto Oka1 (1.Kindai Univ., 2.Waseda Univ., 3.SAGA Light Source, 4.Environmental Materials Inst.)
Keywords:
crystallization,sputter