[20a-P02-1~25] 6.3 Oxide electronics

[20a-P02-4] Neuromorphic Function for Electric Property and Applied Pulse Voltage of Pt/Ti_0.99Sc_0.01O_2-δ (Rutile, Anatase)/Pt Multilayer

〇Airi Maekawa¹, Kisara Tomiyoshi¹, Riku Kaneko¹, Yako Kaito¹, Tohru Higuchi¹ (1.Tokyo Univ. Sci.)

Keywords:

Resistive random access memory,oxide semiconductor,electron-ion mixed condcution

In this study, we have prepared the Pt/Ti_0.99Sc_0.01O_2-δ(Rutile, Anatase)/Pt mutilayer films with crosspoint structure by RF magnetron sputtering and charcterized its strucral and electricak\l properties. Furthermore, we charcterized the nue\uromorphic memory function by applying pulse voltage.