[20a-P02-1~25] 6.3 Oxide electronics

[20a-P02-6] Preparation and Characterization of VO₂ film on alkali-free glass substrate by MOD

〇Tomonori Yamada¹, Masahiro Tahashi¹, Makoto Takahashi¹, Hideo Goto¹ (1.Chubu Univ.)

Keywords:

vanadium dioxide,metal organic decomposition,alkali-free glass