[20a-P02-1~25] 6.3 Oxide electronics

[20a-P02-9] Deposition of Titanium Oxide Using High-Power Pulsed Magnetron Sputtering

〇Miyuki Nishimura¹, Takayuki Ohta¹ (1.Meijo Univ.)

Keywords:

titanium oxide,sputtering,crystal structure