Presentation Information
[20a-P03-6]Fabrication of Large-Area YBCO Superconducting Epitaxial Films by PLD method with Inclining normal of Target
〇(M2)Keita Isiduka1, Noriyuki Taoka1, Yoshiyuki Seike1, Tatsuo Mori1, Yusuke Ichino1 (1.AIT)
Keywords:
YBCO,superconductivity,thin film
YBCO superconductors are expected to be applied to various power devices because of their superconducting transition at inexpensive liquid nitrogen temperatures. However, large-area fabrication of YBCO films is difficult because evaporation species are dispersed in the direction normal to the target surface during PLD deposition, and the chemical composition of the epitaxial thin film deviates from the target composition the further it is away from the target normal. In this study, we investigated the composition distribution of YBCO thin films and the superconducting transition temperature distribution with respect to the target tilt.