[20p-A201-1~16] 3.14 Silicon photonics and integrated photonics (formerly 3.15)

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[20p-A201-6] UV Nanoimprinting process development for large-scale integrated photonics

〇Tomohiro Amemiya¹, Sho Okada¹, Naoki Takahashi¹, Ryuya Sasaki¹, Tsuyoshi Horikawa¹, Yuki Atsumi², Yuki Oda³, Yuta Hara³, Shinji Noda³, Hiroshi Yamamoto³, Thomas Uhrmann³, Andrea Kneidinger³, Risako Mori⁴, Yasushi Fujii⁴, Takahiro Asai⁴, Dai Shiota⁴, Nobuhiko Nishiyama¹ (1.Tokyo Tech, 2.AIST, 3.EVG, 4.TOK)

Keywords:

photonic integrated circuits,silicon photonics,UV nanoimprint lithography