Presentation Information

[20p-A303-4]Computing technology in semiconductor giga-fabrications

〇Masahiro Hasegawa1 (1.Murata Machinery, LTD.)

Keywords:

computing technologies

Recently, mass production of semiconductors is required.
To meet this demand, it is necessary to produce semiconductors by utilizing the large-scaled fabrication (Giga-Fab) at maximal efficiency.
For the maximal utilization of factory, total optimization of production and transport schedule in Giga-Fabs is essential.
In this talk, we review the possibility that recent development of computing technology enables such total optimization of Giga-Fabs.