The 84th JSAP Autumn Meeting 2023

The 84th JSAP Autumn Meeting 2023

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Session Details

Symposium (Oral)Symposium : Accelerating Semiconductor Manufacturing by Cyber-Physical Systems with AI and Optimization Computing

[20p-A303-1~9]Accelerating Semiconductor Manufacturing by Cyber-Physical Systems with AI and Optimization Computing

Wed. Sep 20, 2023 1:30 PM - 7:00 PM JST
Wed. Sep 20, 2023 4:30 AM - 10:00 AM UTC

A303 (KJ Hall)

Hiroyuki Akinaga(AIST), Takumi Mikawa(SCREEN)

1:30 PM - 1:40 PM JST(4:30 AM - 4:40 AM UTC)

[20p-A303-1]Opening address / Accelerating Semiconductor Manufacturing by CPS

〇Takumi Mikawa¹ (1.SCREEN Semicond.)

1:40 PM - 2:20 PM JST(4:40 AM - 5:20 AM UTC)Highlighted Presentation

[20p-A303-2]Potential of Cyber-Physical Systems based on IoT and AI

〇Hideyuki Tokuda¹ (1.National Institute of Information and Communications Technology)

2:20 PM - 3:00 PM JST(5:20 AM - 6:00 AM UTC)

[20p-A303-3]Mathematical and information technology for the realization of cyber-physical systems and their industrial applications

〇Katsuki Fujisawa¹ (1.Kyushu Univ.)

3:00 PM - 3:40 PM JST(6:00 AM - 6:40 AM UTC)

[20p-A303-4]Computing technology in semiconductor giga-fabrications

〇Masahiro Hasegawa¹ (1.Murata Machinery, LTD.)

4:00 PM - 4:40 PM JST(7:00 AM - 7:40 AM UTC)

[20p-A303-5]Cyber Physical System in Minimal Fab for Semiconductor Devices

〇Shiro Hara¹ (1.AIST)

4:40 PM - 5:20 PM JST(7:40 AM - 8:20 AM UTC)

[20p-A303-6]Standardization of output data format for measurement/analysis instruments

〇Shingo Ichimura¹ (1.Waseda Univ. Advisor)

5:20 PM - 6:00 PM JST(8:20 AM - 9:00 AM UTC)

[20p-A303-7]Green Transformation of Semiconductor Processes

〇Masaru Hori¹ (1.Nagoya Univ.)

6:05 PM - 6:55 PM JST(9:05 AM - 9:55 AM UTC)

[20p-A303-8]Panel discussion / Accelerating Semiconductor Manufacturing by CPS

〇Masashi Aono¹, Hideyuki Tokuda², Katsuki Fujisawa³, Masahiro Hasegawa⁴, Shiro Hara⁵, Shingo Ichimura⁶, Masaru Hori⁷, Yasuhito Yoshimizu⁸ (1.Amoeba Energy, 2.NICT, 3.Kyushu Univ., 4.Murata Machinery, 5.AIST, 6.Waseda Univ., 7.Nagoya Univ., 8.KIOXIA)

6:55 PM - 7:00 PM JST(9:55 AM - 10:00 AM UTC)

[20p-A303-9]Closing remark / Green Transition of Semiconductor Fabrication

〇Hiroyuki AKINAGA¹ (1.AIST-DTech)

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