[20p-A303-1~9] Accelerating Semiconductor Manufacturing by Cyber-Physical Systems with AI and Optimization Computing

4:00 PM - 4:40 PM JST(7:00 AM - 7:40 AM UTC)

[20p-A303-5] Cyber Physical System in Minimal Fab for Semiconductor Devices

〇Shiro Hara¹ (1.AIST)

Keywords:

Minimal Fab,Low-volume wide-variety,CPS

When trying to apply cyber-physical systems to practical factories instead of research, there are problems for the entire industry that cannot be handled because the actual factory is too complicated. To solve this problem, (1) make the software flat structure, (2) do not control detailed operations, (3) unify the control system of factory equipment, (4) avoid mutual intrusion between cyber and physical. We set up a policy and developed a factory OS that actually realizes it. FOS is already running in Minimal Fab.