Presentation Information

[20p-A303-8]Panel discussion / Accelerating Semiconductor Manufacturing by CPS

〇Masashi Aono1, Hideyuki Tokuda2, Katsuki Fujisawa3, Masahiro Hasegawa4, Shiro Hara5, Shingo Ichimura6, Masaru Hori7, Yasuhito Yoshimizu8 (1.Amoeba Energy, 2.NICT, 3.Kyushu Univ., 4.Murata Machinery, 5.AIST, 6.Waseda Univ., 7.Nagoya Univ., 8.KIOXIA)

Keywords:

semiconductor,Cyber-Physical Systems,Digital twin