Presentation Information

[20p-A303-9]Closing remark / Green Transition of Semiconductor Fabrication

〇Hiroyuki AKINAGA1 (1.AIST-DTech)

Keywords:

semiconductor,Cyber-Physical Systems,Digital twin

Cyber-Physical Systems that utilize AI and optimization calculations will spur semiconductor manufacturing. I would like to summarize the discussion of our symposium to show the path to green and sustainable fabrication.