Presentation Information
[20p-A303-9]Closing remark / Green Transition of Semiconductor Fabrication
〇Hiroyuki AKINAGA1 (1.AIST-DTech)
Keywords:
semiconductor,Cyber-Physical Systems,Digital twin
Cyber-Physical Systems that utilize AI and optimization calculations will spur semiconductor manufacturing. I would like to summarize the discussion of our symposium to show the path to green and sustainable fabrication.