[20p-A310-1~12] CS.1 Code-sharing Session of 2.3 & 7.4

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[20p-A310-10] Evaluation of plasma irradiation damage on Si surfaces by positron annihilation method

〇Ruiji Shigesada¹, Masayoshi Ichimiya², Takahiko Ban², Atsushi Yabuuchi³, Atsushi Kinomura³, Junichi Yanagisawa² (1.Grad. Sch. of Univ. of Shiga Pref., 2.Univ. of Shiga Pref., 3.KURNS, Kyoto Univ.)

Keywords:

silicon,ion irradiation effect,positron annihilation method