[20p-A310-1~12] CS.1 Code-sharing Session of 2.3 & 7.4

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[20p-A310-2] Negative-cluster ion beam production using protic ionic liquid and its bombardment effects

〇Yukio Fujiwara¹ (1.AIST)

Keywords:

ionic liquid,ion beam,SIMS

An ionic liquid ion source, based on the structure of a liquid metal ion source, can generate ion beams of both positive and negative polarities from the tip of the needle wetted with ionic liquid. Experimental results show that stable beam generation was confirmed in both positive and negative polarities. The charge-up voltage was confirmed to be about +1 V when an electrically insulated metal plate was irradiated with the negative ion beam. Also, results of TOF-SIMS experiments using the negative ion beam are reported.