Presentation Information
[20p-A310-5]Study on polymer desorption process under cluster ion beam bombardment
〇Yuri Mizutani1, Yuki Koshishita2, Hayate Yoshizawa2, Toshio Seki3, Jiro Matsuo3, Makiko Fujii1,2 (1.Dept. of Yokohama Natl. Univ., 2.Grad. Sch. of Yokohama Natl. Univ., 3.Grad. Sch. of Kyoto Univ.)
Keywords:
cluster ion beam,secondary ion mass spectrometry