[20p-A310-1~12] CS.1 Code-sharing Session of 2.3 & 7.4

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[20p-A310-9] Ultra-thin electron transmission window using GCIB for high-sensitivity detection of samples in liquid

〇Masaya Takeuchi¹, Satoru Suzuki², Noriaki Toyoda¹ (1.Univ. of Hyogo, 2.LASTI,Univ. of Hyogo)

Keywords:

Gas cluster ion beam,Silicon nitride,Reactive etching

The most important part of a environmetal cell, which enables XPS and SEM analysis of liquids by enclosing the liquid in a vacuum, is the electron transmission window. In this presentation, we will evaluate the pressure resistance of the ultra-thin electron transmission window (SiNx membrane) by using reactive etching with acetylacetone gas and GCIB, which enables low-damage processing. The ultra-thinned window will be applied to the environmental cell to demonstrate the principle of high-sensitivity detection of liquids.