Presentation Information

[20p-B205-4]Laser microprocessing by a vector beam with enhanced longitudinal electric field

〇(M2)YUKINE TSURU1, Yuichi Kozawa1, Yuuki Uesugi1, Shunichi Sato1 (1.IMRAM, Tohoku Univ.)

Keywords:

microprocessiong,longitudinal electric field,vector beam

Radially polarized beams are known to generate a longitudinal electric field and form a small focal spot under the tight focusing condition using a high numerical aperture lens. This characteristic is a promising ability for improving the spatial resolution in laser micro-processing. However, considering the boundary conditions between different media is necessary to apply the longitudinal electric field to laser processing and its detailed mechanism remains to be fully elucidated. In this study, we report the laser processing characteristics in detail when the longitudinal electric field is significantly enhanced on the interface for the focusing of a radially polarized beam with an amplitude mask.