Presentation Information

[20p-D901-2]Comparing Pulsed DC and Constant DC Facing Target Sputtering of Hydrogenated Intrinsic Amorphous Silicon for High-Quality Surface Passivation of Silicon

〇Shasha Li1, Shinsuke Miyajima1 (1.Tokyo Tech)

Keywords:

silicon heterojunction solar cell,surface passivation,sputtering