Presentation Information
[20p-D901-2]Comparing Pulsed DC and Constant DC Facing Target Sputtering of Hydrogenated Intrinsic Amorphous Silicon for High-Quality Surface Passivation of Silicon
〇Shasha Li1, Shinsuke Miyajima1 (1.Tokyo Tech)
Keywords:
silicon heterojunction solar cell,surface passivation,sputtering