[20p-D901-1~9] 16.3 シリコン系太陽電池

13:45 〜 14:00奨励賞エントリー英語発表

[20p-D901-2] Comparing Pulsed DC and Constant DC Facing Target Sputtering of Hydrogenated Intrinsic Amorphous Silicon for High-Quality Surface Passivation of Silicon

〇Shasha Li¹, Shinsuke Miyajima¹ (1.Tokyo Tech)

キーワード：

silicon heterojunction solar cell、surface passivation、sputtering